Development of MEMS wireless wall temperature sensor for combustion studies

作者：Lee Minhyeok^*; Morimoto Kenichi; Suzuki Yuji

来源：Measurement Science and Technology, 2017, 28(3): 035101.

DOI：10.1088/1361-6501/aa54cf

• inductive coupling
• MEMS
• temperature coefficient of resistance
• temperature coefficient of permittivity
• wireless sensor
• wall temperature

In this paper, a MEMS-based wireless wall temperature sensor for application to combustion studies is proposed. The resonant frequency change of an LCR circuit on the sensor is used to detect the temperature change, and is transferred by inductive coupling between the sensor and the read-out coil. Sensitivity analysis has been made to examine the effect of the resistance/capacitance change of the sensor on the resonant frequency shifts. Based on the present analysis, the sensing principle with either TCR (temperature coefficient of resistance) or TCP (temperature coefficient of permittivity) can be determined for better temperature sensitivity. The sensor configuration is designed through an equivalent circuit model, and verified with a 3D electromagnetic simulation. A prototype sensor on a glass substrate is successfully fabricated through MEMS technologies. Performance of the sensor is evaluated in the steady thermal field with the temperature range from 25 degrees C to 175 degrees C. The profile of the resonant frequency change is well fitted with a quadratic curve derived from the model analysis. The temperature measurement accuracy of 1.6 degrees C at 25 degrees C and 0.87 degrees C at 175 degrees C has been obtained at the measurement distance of 0.71 mm. In addition, a similar measurement uncertainty can be achieved with a 52 ms measurement time interval.

• 出版日期2017-3