The role of helium ion microscopy in the characterisation of complex three-dimensional nanostructures

作者：Rodenburg C^*; Liu X; Jepson M A E; Zhou Z; Rainforth W M; Rodenburg J M

来源：Ultramicroscopy, 2010, 110(9): 1178-1184.

DOI：10.1016/j.ultramic.2010.04.009

• Helium ion microscopy
• Resolution
• Mean escape depth
• Amorphous carbon
• STEM
• Nano-composite

This work addresses two major issues relating to Helium Ion Microscopy (HeIM). First we show that HeIM is capable of solving the interpretation difficulties that arise when complex three-dimensional structures are imaged using traditional high lateral resolution techniques which are transmission based, such as scanning transmission electron microscopy (STEM). Secondly we use a nano-composite coating consisting of amorphous carbon embedded in chromium rich matrix to estimate the mean escape depth for amorphous carbon for secondary electrons generated by helium ion impact as a measure of HeIM depth resolution.

• 出版日期2010-8