A highly efficient CMOS nanoplasmonic crystal enhanced slow-wave thermal emitter improves infrared gas-sensing devices

作者:Pusch Andreas; De Luca Andrea; Oh Sang S; Wuestner Sebastian; Roschuk Tyler; Chen Yiguo; Boual Sophie; Ali Zeeshan; Phillips Chris C; Hong Minghui; Maier Stefan A; Udrea Florin; Hopper Richard H; Hess Ortwin
来源:Scientific Reports, 2015, 5(1): 17451.
DOI:10.1038/srep17451

摘要

The application of plasmonics to thermal emitters is generally assisted by absorptive losses in the metal because Kirchhoff's law prescribes that only good absorbers make good thermal emitters. Based on a designed plasmonic crystal and exploiting a slow-wave lattice resonance and spontaneous thermal plasmon emission, we engineer a tungsten-based thermal emitter, fabricated in an industrial CMOS process, and demonstrate its markedly improved practical use in a prototype non-dispersive infrared (NDIR) gas-sensing device. We show that the emission intensity of the thermal emitter at the CO2 absorption wavelength is enhanced almost 4-fold compared to a standard non-plasmonic emitter, which enables a proportionate increase in the signal-to-noise ratio of the CO2 gas sensor.

  • 出版日期2015-12-7