High performance bimorph piezoelectric MEMS harvester via bulk PZT thick films on thin beryllium-bronze substrate

作者：Yi, Zhiran; Yang, Bin^*; Li, Guimiao; Liu, Jingquan; Chen, Xiang; Wang, Xiaolin; Yang, Chunsheng

来源：Applied Physics Letters, 2017, 111(1): 013902.

DOI：10.1063/1.4991368

• NANOGENERATOR

This letter presents a high performance bimorph piezoelectric MEMS harvester with bulk PZT thick films on both sides of a flexible thin beryllium-bronze substrate via bonding and thinning technologies. The upper and lower PZT layers are thinned down to about 53 mu m and 76 mu m, respectively, and a commercial beryllium bronze with the thickness of about 50 mu m is used as the substrate. The effective volume of this device is 30.6 mm(3). The harvester with a tungsten proof mass generated the close-circuit peak-to-peak voltage of 53.1 V, the output power of 0.979 mW, and the power density of 31.99 mW/cm(3) with the matching load resistance of 360 k Omega at the applied acceleration amplitude of 3.5 g and the applied frequency of 77.2 Hz. Meanwhile, in order to evaluate the stability, the device was measured continuously under applied acceleration amplitudes of 1.0 g and 3.5 g for one hour and demonstrated a good stability. Then, the harvester was utilized to light up LEDs and about twenty-one serial LEDs were lighted up at resonance under an applied acceleration amplitude of 3.0 g. Published by AIP Publishing.

• 出版日期2017-7-3
• 单位上海交通大学