Deposition of DLC Films onto Oxynitriding-Treated V4E High Vanadium Tool Steel through DC-Pulsed PECVD Process

作者：Chang Shih Hsien; Wu Wei Chen; Huang Kuo Tsung; Liu Chung Ming

来源：Materials Transactions, 2017, 58(5): 806-812.

DOI：10.2320/matertrans.M2016375

• DLC
• DC-pulsed PECVD
• oxynitriding treatment
• V4E steel
• wear
• corrosion

In this work, DLC films are prepared by DC-pulsed PECVD after the oxynitriding treatment of V4E high vanadium tool steel. The experimental design includes various power densities (200, 400, 600 and 800 mW.cm(-2)) with an unbalanced bipolar-pulsed voltage. The deposition time is 90 min, and the CH4 gas flow is maintained at 5 sccm, respectively. The experimental results show the duplex coating layers to have better properties when the DLC films are treated by an appropriate power density (400 mW.cm(-2)). These films also possess the lowest wear loss volume (for loads of 2 N and 5 N of 6.23 x 10(-3) mm(3) and 1.19 x 10(-2) mm(3), respectively), the lowest corrosion current (4.09 x 10(-4) A.cm(-2)) and the highest polarization resistance (258.83 Omega.cm(2)) after the 3.5 mass% NaCl corrosion test. This study confirms that the wear and corrosion resistance of V4E tool steel can be effectively improved through the DLC/oxynitriding duplex treatment.

• 出版日期2017