Duplex diamond-like carbon film fabricated on 2Cr13 martensite stainless steel using inner surface ion implantation and deposition

作者：Wang Langping^*; Huang Lei; Wang Yuhang; Xie Zhiwen; Wang Xiaofeng

来源：Surface and Coatings Technology, 2008, 202(14): 3391-3395.

DOI：10.1016/j.surfcoat.2007.12.004

• diamond-like carbon
• plasma immersion ion implantation and deposition
• duplex treatment
• inner surface
• 2Cr13

A duplex plasma immersion ion implantation and deposition (PIIID) process, involving carbon ion implantation and diamond-like carbon (DLC) film deposition, is proposed to treat the inner surface of a tube. Samples of 2Cr13 martensite stainless steel were placed inside the tube to investigate the performance of the films. Carbon ion implantation was finished by biasing the tube with a high voltage, and the DLC film deposition was obtained by biasing the tube with a medium voltage. Raman spectrum, ball-on-disc, indentation and scratch tests were used to investigate the structure, tribological property and adhesion strength of the as-deposited films. The Raman spectrum shows that the sp(3) bonding is formed in the as-synthesized film. Tribological and scratch test results reveal that the duplex DLC coating with the implantation time of I h has the largest adhesion strength and the best wear resistance.

• 出版日期2008-4-15
• 单位哈尔滨工业大学