摘要
Effective surface passivation of type-II InAs/GaSb superlattice photodiodes with cutoff wavelengths in the long-wavelength infrared is presented. A stable passivation layer, the electrical properties of which do not change as a function of the ambient environment nor time, has been prepared by a solvent-based surface preparation, vacuum desorption, and the application of an insulating polyimide layer. Passivated photodiodes, with dimensions ranging from 400x400 to 25x25 mu m(2), with a cutoff wavelength of similar to 11 mu m, exhibited near bulk-limited R(0)A values of similar to 12 Omega cm(2), surface resistivities in excess of 10(4) Omega cm, and very uniform current-voltage behavior at 77 K.
- 出版日期2007-6-4
- 单位西北大学