A 27μW MEMS silicon oscillating accelerometer with bias instability and 10-μg/√Hz noise floor

作者：Wang Xi; Xu Yong Ping; Xia Guo Ming; Zhao Yang; Zhao Jian; Qiu An Ping; Su Yan

来源：5th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2018, 2018-03-26 To 2018-03-29.

DOI：10.1109/ISISS.2018.8358117

• Automatic amplitude controls
• Bias instability
• CMOS readout circuits
• Micro electromechanical system (MEMS)
• Noise floor
• Pierce oscillator
• Silicon oscillating accelerometers
• Ultra low power

This paper describes an in-plane ultra-low power Micro Electro-Mechanical System (MEMS) silicon oscillating accelerometer (SOA) based on pierce oscillators with CMOS readout circuit and automatic amplitude control (AAC). A noise model is proposed to analyze various noise sources in the system. The noises from the readout circuit are minimized so that the SOA performance is dominated by the Brownian noise from MEMS transducer. The fabricated MEMS SOA achieves a bias instability of 4 μg and a noise floor of 10 μg/√Hz, while consuming only 27 μW under a 1.8-V supply.

• 出版日期2018
• 单位中国矿业大学（北京）; 南京理工大学; the National University of Singapore; National university of Singapore