Miniaturization of Bragg-multiplexed membrane transducers

作者：Holmes C^*; Carpenter L G; Gates J C; Smith P G R

来源：Journal of Micromechanics and Microengineering, 2012, 22(2): 025017.

DOI：10.1088/0960-1317/22/2/025017

This paper reports the miniaturization of Bragg-multiplexed pressure sensing membranes for integrated photonic chips. The analysis compares a novel Fabry-Perot Bragg grating (FPBG) design that integrally spans a thin (54 mu m) silica membrane to a recently reported single Bragg grating (BG) design that resides within the membrane. Unlike the single BG, the FPBG maintains spectral integrity as the dimensions of the membrane become sub-millimetre. In addition it is shown that the FPBG structure can also be used for inherent temperature referencing, having a Bragg thermal sensitivtiy of 13.5 pm degrees C-1, which can be decoupled from pressure effects. For the reported sub-millimetre membrane, pressure resolution was enhanced by a factor of three and spectral bandwidth reduced by over five-fold.

• 出版日期2012-2