Application of a High-Resolution Spectrometer in a Broadband Optical Monitor for Film Coating

作者：Wu Yuu Fei^*; Cai Qing Yuan; Zheng Yu Xing; Zhang Rong Jun; Chen Liang Yao

来源：Journal of the Korean Physical Society, 2008, 53(4): 2307-2311.

• Broadband optical monitor
• Film coating
• Spectrometer
• Narrow bandpass filter

The broadband optical monitoring (BOM) method for the thin-film coating process has become more popular due to its handing a higher efficiecy than other methods and the ability to precisely control the film coating process at any thickness. A high-resolution spectrometer working in the broadband spectral range has to be used for the BOM method to monitor the growth process of a narrow bandpass thin-film filter. In this paper, we show the application of a high-resolution spectrometer in BOM for the narrow bandpass thin-film filter-coating process and a way to eliminate effectively the interference error of the substrate. We also describe an experimental setup that can be used to grow a narrow bandpass filter in a real BOM process. be used to grow a narrow bandpass filter ill a real BOM process.

• 出版日期2008-10
• 单位复旦大学