科研之友
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摘要
The purpose of this article is to study the dynamic behavior and modal analysis of a micro-optomechatronic device with primary applications to force sensing and optical attenuation/coupling. The system consists of two initially aligned micro-cantilevers with a narrow gap between them. The light beam enters to the first waveguide and, after propagation along it, couples to second waveguide through the mentioned narrow gap. The externally static or dynamic applied force on the first micro-cantilever deflects it and results in reduced optical coupling between the two waveguides. Changes in this factor are measured to give the properties of the applied force.
- 出版日期2010
