Analysis of squareness measurement using a laser interferometer system

作者：Lee Dong Mok; Lee Hoon Hee; Yang Seung Han^*

来源：International Journal of Precision Engineering and Manufacturing, 2013, 14(10): 1839-1846.

DOI：10.1007/s12541-013-0246-0

• Squareness measurement
• Laser interferometer
• Abbe%26apos
• s error
• Representative line
• Best fit
• Optical square

Squareness measurements of the driving axes of a machine tool are very important in order to evaluate the performance of the machine. A laser interferometer measurement is one of the most reliable ways to measure squareness. However, a squareness measurement using a laser interferometer system with an optical square causes restrictions in the straightness interferometer setup, which results in the occurrence of Abbe%26apos;s offset. The Abbe%26apos;s offset combined with angular errors during the motion of an axis causes Abbe%26apos;s error. In addition, difficulty in the optical square setup causes restrictions on other optics and limitations of the measurable range. We present mathematical approaches that can be used to eliminate Abbe%26apos;s error and to estimate squareness over the full range by using the best fit of straightness data measured without an optical square. Experiments for squareness measurements of a threeaxis machine tool are conducted. The proposed techniques are used for squareness evaluation with the elimination of Abbe%26apos;s error and also for squareness estimation for the full travel range.

• 出版日期2013-10