摘要

A modified Levenberg-Marquardt (MLM) algorithm is proposed to substitute for modified G-S (MGS) algorithm in some situations of phase-diverse phase retrieval wavefront sensing (WFS), such as the obstructed pupil, in which the second derivative information is specifically employed to eliminate the local minimum stagnation. Experiments have been performed to validate MLM algorithm in WFS accuracy (less than lambda/30 RMS) referring to ZYGO interferometer results and in WFS repeatability (less than lambda/200 RMS), even the dynamic range is more than 7 lambda PV. Moreover, experiments have shown the MLM algorithm is superior to the MGS algorithm both in WFS accuracy and repeatability.

全文