Determination of the Orientations and Microstructures of Pb(Zr,Ti)O Films Fabricated on Different Substrate Structures

作者：Lee Jae Wung^*; Kawai Yusuke; Tanaka Shuji; Esashi Masayoshi

来源：Sensors and Materials, 2012, 24(7): 413-418.

• PZT
• film
• orientation
• membrane

Piezoelectric (PZT) films with different orientations and microstructures were fabricated on different substrate structures in one chip. To investigate the substrate structural effect of Pb(Zr0.52Ti0.48) films, different substrate structures of a Pt membrane and Pt on a Si substrate (called platinized Si) were fabricated after Si back-side etching. The PZT films were fabricated on the prepared substrates by RE magnetron sputtering with a single oxide target. After the annealing of a PZT film, different microstructures and Forientations were observed from different parts of the sample. The PZT film on the Pt membrane has (001) orientation and grains of similar to 1 mu m size. On the other hand, the PZT film on platinized Si has (1) orientation and grains of similar to 3 mu m size.

• 出版日期2012