摘要

Alternating current dielectrophoresis (DEP) is an excellent technique to assemble nanoscale materials. For efficient DEP, the optimization of the key parameters like peak-to-peak voltage, applied frequency, and processing time is required for good device. In this work, we have assembled graphene oxide (GO) nanostructures mixed with platinum (Pt) nanoparticles between the micro gap electrodes for a proficient hydrogen gas sensors. The Pt-decorated GO nanostructures were well located between a pair of prepatterned Ti/Au electrodes by controlling the DEP technique with the optimized parameters and subsequently thermally reduced before sensing. The device fabricated using the DEP technique with the optimized parameters showed relatively high sensitivity (similar to 10%) to 200 ppm hydrogen gas at room temperature. The results indicates that the device could be used in several industry applications, such as gas storage and leak detection.