科研之友
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摘要
An improved laser generated and laser detected surface acoustic wave (LG/LD SAW) detection system with broad band response based on a differential confocal configuration has been developed to determine the Young';s modulus of a layered structure formed of a thermal SiO2 film on a Si substrate. A dispersion curve with suitable measuring characteristics even at a high frequency range for this kind of measurements was obtained by the system. Fitting the curve processed experimentally with the one obtained by theoretical computation, yielded a value of Young';s modulus within a satisfactory range, and estimated with a high resolution.
- 出版日期2011
- 单位天津大学
