Phase Composition and Properties of (Ti, Al)N Coatings Deposited by Multi-arc Ion Plating Assisted with Hollow Cathode

作者：Wu Hua^*; You Shenshen; Jiang Ying

来源：Rare Metal Materials and Engineering, 2016, 45(5): 1209-1214.

• ion beam assisted deposition
• (Ti, Al)N coating
• phase composition

(Ti, Al)N coatings were prepared under different Ti/Al mosaic targets (30 at%Al, 50 at%Al, 70 at%Al) by multi-arc ion plating technology which was in hollow cathode electron beam assisted deposition situation. The quality and properties of the coatings were detected by XRD, CLSM and universal nano/micro material tester. The effects of Ti/Al target on phase composition, surface roughness, friction coefficient, hardness and oxidation resistance were analyzed. The results show that the coating produced by 50 at%Al target is mainly composed of Ti(1-x)A1(x)N phase, which shows minimum surface roughness (0.3188), minimum friction coefficient (0.6074), and maximum hardness (34.19 GPa). The coating exhibits no obvious change on phase composition when heating temperature is below 800 degrees C. However, at 900 degrees C the substrate is oxidized due to the coating cracks. "Hybrid interface" can form when hollow cathode electron beam assists deposition, and "surface roughness" can also be reduced under this condition.

• 出版日期2016-5
• 单位长春工业大学