A framework for using optical sensors in nanomeasuring machines over I++/DME

作者：Sparrer E^*; Machleidt T; Hausotte T; Franke K H; Manske E

来源：Measurement Science and Technology, 2012, 23(7): 074013.

DOI：10.1088/0957-0233/23/7/074013

• nanopositioning and nanomeasuring machine
• NPMM
• Inspection plus plus for Dimensional Measurement Equipment
• I plus plus DME
• Optical Sensor Interface Standard
• OSIS
• framework
• white light interferometry

This paper discusses the problem of integrating optical sensors into CMMs. First the basic concept of optical sensors is briefly introduced as well as the targeted measurement implementation standard, I++DME, and the Optical Sensor Interface Standard, which is still seldom used but is gaining acceptance. A novel generic software framework is introduced which helps to simplify the use of optical sensors in CMMs. To demonstrate the feasibility of integrating an optical sensor into a CMM, the framework has been successfully implemented around a white light interferometer, in which the sensor system is mounted in an ultra-precision CMM. The actual process control and data analysis was done using a third-party metrology application, which does not normally support either ultra-precision CMMs or optical sensors.

• 出版日期2012-7