Application of Carbon Nanotube (CNT) to Photosensitive Diazo/PVA Resist (2) - Conductivity

作者：Harada Kieko^*; Nakada Masahiro; Matsuda Kiyomi; Takahara Shigeru; Hoshino Katsuyoshi; Sugita Kazuyuki

来源：Journal of Photopolymer Science and Technology, 2010, 23(1): 137-140.

DOI：10.2494/photopolymer.23.137

• photosensitive diazo compound
• multi-walled nanotube (CNT)
• C(60)
• conductivity
• Photodecomposition

Electro-conductivity of a thick Diphenylamine-4-diazonium sulfate/formaldehyde condensate/polyvinyl alcohol (DSR/PVA) resist layers increased by the incorporation of multi-walled carbon nanotube (CNT) and fulleren C(60) (weight ratio of CNT or C(60) to DSR = 1.00 : 1 similar to 3.00:1). Conductivity of DSR/PVA film with CNT was one order larger than that with C(60). The larger conductivity depends on the charge leakage through the network or thread-bundle structure of multi-walled CNT. Conductivity of shorter CNT (3 similar to 20 nm) was larger than that with long CNT (40 similar to 70 nm). The a values for the thin films ( 6 mu m) were ca. two times larger than those for the thick films ( 12 mu m). Photo decomposition of DSR/PVA resist with CNT was accelerated reductively by the electrons evolved from CNT, absorbing light energy. Electron rich characteristics of CNT may play an important role in the enhancement of electric conductivity and photo decomposition rate.

• 出版日期2010