High-Performance TO Switches on Compact Cu-Dielectric-Si Hybrid Plasmonic WRRs

作者：Zhu Shiyang^*; Lin Bu; Lo Guo Qiang; Kwong Dim Lee

来源：IEEE Photonics Technology Letters, 2014, 26(24): 2495-2498.

DOI：10.1109/LPT.2014.2359455

• Hybrid plasmonic waveguide
• waveguide ring resonator
• thermo-optic effect
• integrated photonics
• CMOS compatibility

We present plasmonic thermo-optic (TO) switches made of compact Cu-dielectric-Si hybrid plasmonic waveguide ring resonators (WRRs), which offer high tuning efficiency and fast switching speed by placing a metal heater closely above the Cu cap and choosing a material with high TO coefficient as the sandwiched dielectric. Prototype devices with 2.5-mu m radius and Si3N4 as the dielectric are fabricated on the silicon-on-insulator platform using standard complementary metal-oxide-semiconductor technology and are measured at 1.55-mu m telecom wavelengths. They exhibit a Q-value of similar to 166, a tuning efficiency of similar to 1.1 nm/mW, a response time of similar to 6.5 mu s, and an output modulation of similar to 5 dB under a 5 V/10-kHZ driving voltage. Methods for further performance improvement are addressed.

• 出版日期2014-12-15