Design and Characterization of Micro Thermoelectric Cross-Plane Generators With Electroplated Bi2Te3, SbxTey, and Reflow Soldering

作者：Roth Reinhard^*; Rostek Raimar; Cobry Keith; Koehler Christian; Groh Moritz; Woias Peter

来源：Journal of Microelectromechanical Systems, 2014, 23(4): 961-971.

DOI：10.1109/JMEMS.2014.2303198

• Bi2Te3
• Sb2Te3
• electrochemical deposition
• energy harvesting
• SU-8
• thermoelectric generator
• 3-D microstructure
• reflow soldering

We demonstrate and discuss the fabrication of cross-plane microthermoelectric generators with electrochemically deposited thermoelectric materials. A new process based on two layers of photoresist is presented to deposit the legs on the final substrate. The n-type Bi2Te3, Cu, and p-type SbxTey are integrated into the generator. The deposition of antimony telluride is performed to the largest thickness reported to date. The influence of thermal annealing on the material properties is studied. A new flip-chip reflow soldering process with Bi57Sn42Ag1 soldering paste is presented that allows for enhanced thermal coupling of the generators. The manufactured generators are electrically and thermally fully characterized. They generate up to 1.63 mu W cm(-2) K-2, which corresponds to a maximum power density of 2434.4 mu W cm(-2). [2013-0312]

• 出版日期2014-8