摘要

In this paper, the derivation method used in (J. Microelectromech. Systems 3 (1994) 105) and the solutions of dynamic admittance matrix of a piezoelectric device derived from the method are reviewed. By solving the problem of dynamic responses of a piezoelectric cantilever bimorph with mode analysis method, an alternative approach in the derivation of the dynamic admittance matrix and other related parameters of a piezoelectric system, which can be expressed explicitly in terms of series resonance characteristics of the structure, is presented. It is shown that this form of solutions may offer some conveniences in studying mechanical and electrical properties of the system in the vicinity of resonance frequencies.