科研之友
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摘要
In this paper we present the results of plasma cleaning of glass substrates using the Diffuse Coplanar Surface Barrier Discharge (DCSBD) operated in air at atmospheric pressure. The results of AFM measurements indicate that short time of treatment of DCSBD did not increase the surface roughness substantially. The results of contact angle measurement show that the substrate after plasma treatment is more wettable than before plasma treatment.
- 出版日期2012
