Au/TiO2 Nanotubes/Ti-Based Solid-State Vapor Sensor: Efficient Sensing in Resistive and Capacitive Modes

作者：Bindra Prateek; Gangopadhyay Subhashis; Hazra Arnab^*

来源：IEEE Transactions on Electron Devices, 2018, 65(5): 1918-1924.

DOI：10.1109/TED.2018.2809677

• Capacitive sensing
• equivalent circuit model
• impedance analysis
• resistive
• sandwich device structure and TiO2 nanotubes array

Fabrication of TiO2 nanotubes-based solid-state vapor sensor (Au/TiO2 nanotubes/Ti) and its performance analysis for both resistive-and capacitive-mode sensing mechanisms are discussed here. Highly ordered TiO2 nanotubes array has been synthesized by the electro-chemical anodization technique. Structure and morphology of the as-grown TiO2 nanotubes have been characterized using X-ray diffraction and field-emission scanning electron microscopy. X-ray photoelectron spectroscopy has been used to study the chemical states of the TiO2 nanotubes. The sensor device has successfully been tested for ethanol vapor. The effect of temperature, pressure, and reducing ambient (i.e., partial pressure of ethanol vapor) has been studied using the impedance analysis method. The resistive and capacitive components of the impedance were measured individually. The sensor resistance decreased by 93.38%, whereas the capacitance increased by 28789.95% after an exposure to 1000 ppm of ethanol. Both the resistive and capacitive sensing performance of Au/TiO2 nanotubes/Ti device have been correlated with the proposed circuit model to achieve an improvised vapor sensing.

• 出版日期2018-5