科研之友
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摘要
In this paper, we proposed a method to determine the focal spot location of two photon polymerization. Four spiral squares with eleven lines were fabricated in four corners of a 200 mu m x 200 mu m square area. The cutting location of these lines changed continuously. The first layer of structure to be processed could be accurately positioning in any position of this 200 mu m x 200 mu m square area by observing and analyzing the processing results of the four spiral squares. With this method, the height of microstructure to be processed could be accuracy controlled. Four meshing gears were successfully fabricated with the average deviation of 2.30% in height.
