科研之友
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摘要
In this article, we describe a new experimental setup which has been developed to investigate the fatigue behavior of thin metal films on polymer substrates as used in micro-optical components. The setup is based on the ring-on-ring test and includes an optical in situ failure detection system. The method is validated for thin Au films by comparing the in situ results with microscopical analyses using scanning electron and atomic force microscopies.
- 出版日期2006-10
