Direct Fabrication of Arbitrary-Shaped Ferroelectric Nanostructures on Plastic, Glass, and Silicon Substrates

作者：Kim Suenne^*; Bastani Yaser; Lu Haidong; King William P; Marder Seth; Sandhage Kenneth H; Gruverman Alexei; Riedo Elisa; Bassiri Gharb Nazanin

来源：Advanced Materials, 2011, 23(33): 3786-+.

DOI：10.1002/adma.201101991

A complementary metal-oxide-semiconductor (CMOS)-compatible method for the direct fabrication of arbitrary-shaped Pb(Zr0.52Ti0.48)O(3)and PbTiO3 ferroelectric/piezoelectric nanostructures on plastic, silicon, and soda-lime glass substrates is reported. Thermochemical nanolithography is used to induce nanoscale crystallization of sol-gel precursor films. Ferroelectric lines with width >= 30 nm, spheres with diameter >= 10 nm, and densities up to 213 Gb in(-2) are produced.

• 出版日期2011-9-1