An Automated Basic Gases Monitor Coupled with a Parallel-plate Wet Denuder for Monitoring of Ammonia and Amines in Clean Rooms

作者：Shiramizu Yoshimi^*; Tanaka Masaru; Tanaka Hideji; Takeuchi Masaki

来源：Bunseki Kagaku, 2017, 66(7): 503-508.

DOI：10.2116/bunsekikagaku.66.503

• basic gases monitor
• parallel-plate wet denuder
• ion chromatography
• ammonia
• amine
• clean room

This paper describes the automated basic gases measuring technology for the near-real-time monitoring of ammonia (NH3) and amines in a clean room. The analytes collected with a parallel-plate wet denuder (PPWD) are continuously pumped into one of two cation concentration columns for 15 min, and determined on-line by means of ion chromatography. While one concentration column is used for chromatographic separation, the other is used for loading the sample solution. The PPWD collects quantitatively mono ethanolamine (MEA) gas at a sampling flow rate of 2.5 L min(-1). The response time to any variability in the MEA gas concentration is fast enough for near-real-time monitoring. The limits of detection are 0.005 mu g m(-3) for NH3 gas, 0.01 mu g m(-3) for MEA gas, and 0.02 mu g m(-3) for N-methylethanolamine (N-MEA) gas. The NH3 and N-MEA gas concentrations have been successfully measured at semiconductor manufacturing clean rooms.

• 出版日期2017-7