科研之友
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摘要
This paper presents the design and testing results of an electrothermally driven MEMS (microelectromechanical systems) actuator. Different from conventional uni-directional U-beam thermal actuators, this in-plane bi-directional electrothermal (IBET) actuator is capable of producing displacements in two directions as a single device. It is important to note that merely coupling two conventional uni-directional U-beam electrothermal actuators is insufficient to achieve bi-directional motion, as the resistance from the oppositely configured actuator severely limits net motion and leads to poor performance. An optimized IBET design was obtained through numerical simulation using finite element modeling. The devices were fabricated using the standard polyMUMPs surface micromachining process. Experimental results demonstrate that the IBET microactuators have a displacement range of 12 mu m (6 mu m in either direction).
- 出版日期2006-10
