A novel printing technique for highly integrated organic devices

作者：Luessem Bjoern; Karipidou Zoi; Schreiber Akos; Yasuda Akio; Wessels Jurina M; Nelles Gabriele

来源：Microelectronic Engineering, 2010, 87(4): 614-619.

DOI：10.1016/j.mee.2009.08.023

• Organic and molecular devices
• Nanopatterning
• Nano-imprint lithography
• Optical lithography
• Printing

A new printing technology is described, which is capable of printing metallic electrodes onto organic layers. Electrodes are defined on top of a sacrificial layer by optical or nano-imprint lithography. To increase the stability of the process the electrodes are coated with several backing layers. The metallic features are released from the sacrificial layer by immersion in water and subsequently transferred onto the target substrate. By the use of nano-imprint lithography, feature sizes below 100 nm are achieved. The strengths of the printing technology are high integration density, versatility and reproducibility.

• 出版日期2010-4