Micromilling characteristics and electrochemically assisted reconditioning of polycrystalline diamond tool surfaces for ultra-precision machining of high-purity SiC

作者：Katahira Kazutoshi^*; Takesue Shogo; Komotori Jun; Yamazaki Kazuo

来源：CIRP Annals, 2014, 63(1): 329-332.

DOI：10.1016/j.cirp.2014.03.031

• Micromachining
• Silicon carbide
• Polycrystalline diamond (PCD) tool

The production of extremely thick silicon carbide (SiC) has recently become possible with the advent of a specific chemical vapor deposition process. Ultra-precision machining of high-purity SiC has been performed by using a polycrystalline diamond (PCD) micromilling tool to investigate the machining characteristics. Results indicate that a high-quality surface (R-a = 1.7 nm) can be obtained when the removed chips are thin enough to achieve ductile mode machining. Micron-sized wells and groove structures with nanometer-scale surface roughness were successfully machined by using the PCD tool. In addition, a new electrochemically assisted surface reconditioning process has been proposed to remove the contaminant material adhered onto the PCD tool surfaces after prolonged machining.

• 出版日期2014
• 单位RIKEN