Development of a precision grinding machine system for the fabrication of micro V-grooves array

作者：Wang, S. J.; Chen, X.; Liu, Q.; Zhou, C. Q.; Liu, J. Q.; Yin, Z. Q.^*

来源：International Journal of Advanced Manufacturing Technology, 2018, 97(5-8): 2141-2150.

DOI：10.1007/s00170-018-2042-6

• Precision grinding machine
• Micro V-grooves array
• Optical glass
• Diamond grinding wheel

The microstructures arrays are widely used and have good prospects in different applications because of their special and unique engineering functions. Micro V-grooves array is one of the most common micro structures used for optical and biomedical functions. Precision grinding is one of the micro mechanical machining technologies for a wide range of hard non-ferrous materials to fabricate micro structures array. In this paper, a three-axis computer numerical control (CNC) grinding machine tool is designed for the grinding of micro V-grooves array on hard and brittle materials. Material removal and machining strategy are studied for the grinding of V-grooves array. A machining strategy design (MSD) system is established to generate NC program, simulate the tool paths and machining process as well as predict the total machining time for the grinding of V-grooves array in the developed machine tool. Experiments are designed to grind flat surface and micro V-grooves array on optical glass. The experimental results show that the grinding machine tool can produce high quality surface and micro V-grooves array with sub-micrometer form accuracy.

• 出版日期2018-7
• 单位广东工业大学