科研之友
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摘要
The micro gas sensor for ammonia gas was fabricated by using a MEMS technology and a sol gel process and its sensing properties were investigated. Palladium doped tungsten trioxide as a sensing material was synthesized by a sol-gel method. Synthesized particles of Pd doped-WO3 were characterized with an average particle size of about 100 nm by FE-SEM images. The sensing material was coated on the micro platform and annealed at 400 degrees C. The maximum gas sensitivity was -54% at 350 degrees C for 5.0 ppm-NH3. The gas sensitivity showed a linear behavior with increasing NH3 concentration.
- 出版日期2011-2
