Measurement of thin film piezoelectric constants using x-ray diffraction technique

作者：Yu Y H^*; Lai M O; Lu L

来源：Physica Scripta, 2007, T129: 353-357.

DOI：10.1088/0031-8949/2007/T129/078

A new method to measure the piezoelectric constants of d(33)(f) and d(31)(f) of thin films using x-ray diffraction (XRD) is proposed. Piezoelectric constant d(33)(f) is calculated from the measurement of change in out-of-plane lattice spacing of the piezoelectric films while piezoelectric constant d(31)(f) is obtained from the change in the slope of d(phi psi) versus sin(psi)(2) curves before and after applying an electric field over the film. This method improves the accuracy by directly measuring the strains in the films induced by the externally applied electric field instead of the surface displacement that could easily be interfered with by environment) vibration and surface morphology of the thin films.

• 出版日期2007-12