An industrial solution to object pose estimation for automatic semiconductor fabrication

作者：Luo, HongGen; Zhu, LiMin^*; Ding, Han

来源：International Journal of Advanced Manufacturing Technology, 2007, 32(9-10): 969-977.

DOI：10.1007/s00170-006-0409-6

• camera localization
• exterior orientation
• manufacturing automation
• pose estimation

For the semiconductor industry, automatic object pose estimation is often required to avoid operator intervention in manufacturing processes, make throughput even faster, and maintain processes consistency. This paper presents a new framework for a monocular vision system that can estimate object pose. Hough transform is introduced to detect straight lines, so that the intersection of cross mark can be easily computed by solving two line equations. Estimation of object pose from a single view is discussed and implemented. The contribution of this paper consists of a linear industrial solution to object pose estimation for automatic semiconductor fabrication. Simulations and experiments are performed to verify the proposed algorithm for object pose estimation, and the accuracy of the automatic object pose estimation scheme is also evaluated.

• 出版日期2007-4
• 单位上海交通大学