An SNS technology process for ramp junction based digital superconducting circuits

作者：Hagedorn D^*; Khabipov M; Dolata R; Buchholz FI; Niemeyer J

来源：IEEE Transactions on Applied Superconductivity, 2003, 13(2): 1096-1099.

DOI：10.1109/TASC.2003.814164

• Josephson effect
• rapid single flux quantum circuits
• SNS technology
• superconducting electronics

The SNS (Nb/HfTi/Nb) ramp junction technology process has been improved for digital superconducting circuit operation. DC interferometers were realized on an isolated superconducting ground plane, connections being realized through windows in the insulation layers. The inductances of superconducting Nb striplines (widths w down to the sub-mum range) were measured. For a 250 nm SiO2/Nb-oxide insulation layer, the sheet inductances of striplines were determined at 0.382 +/- 0.009, 0.340 +/- 0.005, and 0.293 +/- 0.008 pH (stripline widths: 1.5, 1.0, 0.54 mum) and compared with data calculated by different inductance evaluation programs. The Josephson junctions used in the interferometers exh

• 出版日期2003-6