Atomic layer deposition of ZnS nanotubes

作者:Farhangfar Sh*; Yang R B; Pelletier M; Nielsch K
来源:Nanotechnology, 2009, 20(32): 325602.
DOI:10.1088/0957-4484/20/32/325602

摘要

We report on the growth of high-aspect-ratio (greater than or similar to 300) zinc sulfide nanotubes with variable, precisely tunable, wall thicknesses and tube diameters into highly ordered pores of anodic alumina templates by atomic layer deposition (ALD) at temperatures as low as 75 degrees C. Various characterization techniques are employed to gain information on the composition, morphology and crystal structure of the synthesized samples. Besides practical applications, the ALD-grown tubes could be envisaged as model systems for the study of a certain class of size-dependent quantum and classical phenomena.

  • 出版日期2009-8-12