A nickel(II) guanidinate compound and its potential as CVD precursor for nickel related films

作者：Zhang, Yuxiang; Du, Liyong; Liu, Xinfang; Ding, Yuqiang^*

来源：Polyhedron, 2018, 156: 218-222.

DOI：10.1016/j.poly.2018.09.043

• Synthesis
• Nickel(II)
• Guanidinate
• Thermal properties
• CVD precursor

In this study, a nickel(II) compound with guanidinate ligand of the general form [((Me)(2)NC((PrN)-Pr-1)(2))(2)Ni] has been synthesized and isolated from the reaction of NiCl2 with the corresponding lithium salt of guanidinate ligand [(Me)(2)NC((PrN)-Pr-1)(2)Li] at 70 degrees C. Its structure was determined by H-1 NMR, elemental analysis, and single crystal X-ray diffraction. Thermogravimetric analysis (TGA) was employed to study the thermal properties (including thermal stability, volatility, vapor pressure and transport behavior) of compound. Furthermore, a deposition experiment was made to examine the compound's potential as CVD precursor, and a Ni metal film was successfully deposited. These preliminary results illustrate the potential of this compound to act as CVD precursor.

• 出版日期2018-12-1
• 单位洛阳师范学院; 江南大学