科研之友
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摘要
Using gas chromatography and high-resolution Fourier-transform IR spectroscopy, we have determined the concentrations of C-1-C-4 hydrocarbon impurities in isotopically unmodified silicon tetrafluoride before and after fine purification and in Si-28-enriched SiF4. The concentrations of C-1-C-4 hydrocarbon impurities in silicon tetrafluoride for SiH4 synthesis have been shown to correlate with those in the synthesized silane.
- 出版日期2007-4
