Degradation modeling and monitoring of machines using operation-specific hidden Markov models

作者：Cholette Michael E^*; Djurdjanovic Dragan

来源：IIE Transactions, 2014, 46(10): 1107-1123.

DOI：10.1080/0740817X.2014.905734

• Hidden Markov models
• degradation modeling
• condition monitoring

In this article, a novel data-driven approach to monitoring of systems operating under variable operating conditions is described. The method is based on characterizing the degradation process via a set of operation-specific hidden Markov models (HMMs), whose hidden states represent the unobservable degradation states of the monitored system while its observable symbols represent the sensor readings. Using the HMM framework, modeling, identification, and monitoring methods are detailed that allow one to identify an HMM of degradation for each operation from mixed-operation data and perform operation-specific monitoring of the system. Using a large data set provided by a major manufacturer, the new methods are applied to a semiconductor manufacturing process running multiple operations in a production environment.

• 出版日期2014-10