A hybrid PDMS-Parylene subdural multi-electrode array

作者：Ochoa Manuel^*; Wei Pinghung; Wolley Andrew J; Otto Kevin J; Ziaie Babak

来源：Biomedical Microdevices, 2013, 15(3): 437-443.

DOI：10.1007/s10544-013-9743-2

• PDMS
• Parylene
• Epilepsy
• Brain Computer Interface (BCI)
• Subdural electrode
• ECoG
• Flexible electrode

In this paper, we report on a cost effective and simple method for fabricating a flexible multi-electrode array for subdural neural recording. The electrode was fabricated using a PDMS-Parylene bilayer to combine the major advantages of both materials. Mechanical and electrical characterizations were performed to confirm functionality of a 16-site electrode array under various flexed/bent conditions. The electrode array was helically wound around a 3 mm diameter cylindrical tube and laid over a 2 cm diameter sphere while maintaining its recording capability. Experimental results showed impedance values between 300 ka"broken vertical bar and 600 ka"broken vertical bar at 1 kHz for 90 mu m diameter gold recording sites. Acoustically evoked neural activity was successfully recorded from rat auditory cortex, confirming in vivo functionality.

• 出版日期2013-6