AFM characterization of nanopositioner in-plane stiffnesses

作者：Yang Seung Ho^*; Kim Yongsik; Purushotham Kavuri Premsagar; Yoo Jae Myung; Choi Young Man; Dagalakis Nicholas

来源：Sensors and Actuators A: Physical , 2010, 163(1): 383-387.

DOI：10.1016/j.sna.2010.07.006

• AFM
• Colloidal probe
• In-plane stiffness
• MEMS
• Nanopositioner

A versatile method for measurement of in-plane stiffness of micro-elements was developed and its usefulness has been demonstrated. The in-plane stiffness of a NIST nanopositioner has been measured directly using a colloidal probe in an AFM without any fixture. Using this method it was possible to measure the in-plane stiffness at different locations of the same micro-element. The in-plane stiffness ratio of a microlever system was also measured and a good agreement was found between the calculated and measured values. Further, when the minimum width of flexures is 4 mu m, the measured in-plane stiffnesses showed a close agreement with the calculated value. Published by Elsevier B.V.

• 出版日期2010-9