摘要

This paper describes a hybrid process of electro chemical machining (ECM) and one-pulse electro discharge (OPED) to fabricate micro coordinate measuring machine's (CMM's) tactile spherical stylus tips. During the micro tool fabrication by ECM process, photo image measurement was equipped on the machine to increase the diameter controllability in this study. The results show that the diameter of the spherical stylus is predictable with different electro discharge energy of OPED process even the diameter deviation of micro tools within a few micrometers. The sphericity deviation of ball-ended stylus tips is approximately +/- 2 mu m. It is expected that the micro spherical stylus for CMM's probing heads could be fabricated more efficiency by this hybrid machining process.

  • 出版日期2014-9