Analyses of Morphologies in Block Copolymer Thin Films by Grazing Incidence Small Angle X-ray Scattering

作者：Takenaka Mikihito^*; Yoshida Hiroshi; Ogawa Hiroki

来源：Journal of Photopolymer Science and Technology, 2014, 27(6): 751-755.

DOI：10.2494/photopolymer.27.751

• Block copolymer
• GISAXS
• DWBA
• Solvent Anneal
• Spin-Cast

This article reviews the technique to observe the morphologies of block copolymer in thin films: grazing incidence small-angle X-ray scattering (GISAXS). In-situ measurement of GISAXS with synchrotron X-ray incident beam enables us to measure the self-assembling processes of block copolymer thin film during solvent anneal and spin cast process.

• 出版日期2014