Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

作者：Tong HD^*; Gielens FC; Gardeniers JGE; Jansen HV; Berenschot JW; de Boer MJ; de Boer JH; van Rijn CJM; Elwenspoek MC

来源：Journal of Microelectromechanical Systems, 2005, 14(1): 113-124.

DOI：10.1109/JMEMS.2004.839005

• hydrogen separation
• membrane module
• membrane reactor
• microfabrication technology
• Pd-Ag membrane
• SiN microsieves
• {110} wafers

A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H-2/m(2) (.) s with a minimal selectivity of 1500 for hydrogen over helium (H-2/He) at 450 degreesC and 83 kPa H-2 retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.

• 出版日期2005-2