Development of Diamond and Silicon MEMS Sensor Arrays with Integrated Readout for Vapor Detection

作者：Possas Abreu Maira^*; Ghassemi Farbod; Rousseau Lionel; Scorsone Emmanuel; Descours Emilie; Lissorgues Gaelle

来源：Sensors (Switzerland), 2017, 17(6): 1163.

DOI：10.3390/s17061163

• microcantilevers
• electronic nose
• VOC discrimination
• gas sensors
• sensor arrays
• synthetic diamond

This paper reports on the development of an autonomous instrument based on an array of eight resonant microcantilevers for vapor detection. The fabricated sensors are label-free devices, allowing chemical and biological functionalization. In this work, sensors based on an array of silicon and synthetic diamond microcantilevers are sensitized with polymeric films for the detection of analytes. The main advantage of the proposed system is that sensors can be easily changed for another application or for cleaning since the developed gas cell presents removable electrical connections. We report the successful application of our electronic nose approach to detect 12 volatile organic compounds. Moreover, the response pattern of the cantilever arrays is interpreted via principal component analysis (PCA) techniques in order to identify samples.

• 出版日期2017-6
• 单位中国地震局