Design and realization of a universal capacitive readout integrated circuit

作者：Liu, Mengliang; Xie, Liang; Jin, Xiangliang^*

来源：Analog Integrated Circuits and Signal Processing, 2015, 82(2): 449-456.

DOI：10.1007/s10470-014-0470-2

• Capacitive readout circuit
• Analog integrated circuit
• Micro-electro-mechanical system (MEMS)
• Transient simulation model

This paper introduces a gain-programmable low noise switched capacitor readout circuit for micro-electro-mechanical system (MEMS) accelerometer with signal bandwidth of 200 Hz. A two programmable capacitor arrays are also used to compensate the balanced capacitance offset that comes from the MEMS accelerometer. A brief equivalent model of the MEMS acceleration is introduced to simulate the transient response of the readout circuit. The proposed capacitor readout circuit has been fabricated in a three-metal two-poly 0.35 mu m CMOS process. Measured results show that the readout circuit can sense difference and single capacitor with 78.1 dB dynamic.

• 出版日期2015-2
• 单位湘潭大学