A theoretical analysis and development of a quartz strip mass-sensitive resonator AT-cut

作者：Lazarov Y^*; Dulmet B; Raicheva Z; Spassov L; Georgieva V; Gadjanova V; Atanassov M; Yordanov Ts

来源：Optoelectronics and Advanced Materials-Rapid Communications, 2010, 4(11): 1811-1814.

• Theoretical analysis
• Quartz
• Mass-sensitive resonator
• Sensor

A theoretical analysis and development of an AT-cut quartz strip mass-sensitive resonator operating at 20 MHz fundamental thickness-shear mode is presented in this paper. The frequency spectra of acoustic waves propagating in a quartz strip plate is analyzed. Quartz plate dimensions ratio is determined on the basis of the theoretical analysis results. This assures a dominant contribution of the main thickness-shear mode in the complex wave, with a minimal modification as a result of the coupling with unwanted modes. A new miniature quartz mass-sensitive resonator is designed. An experimental series of resonators is produced and resonators motional parameters are measured. Samples of mass-sensitive resonators can be investigated as high sensitive sensors for registration of noxious gases in the atmosphere, like CO(2), nitric oxides etc.

• 出版日期2010-11