A net-shape fabrication process of alumina micro-components using a soft lithography technique

作者：Zhu Zhigang^*; Wei Xueyong; Jiang Kyle

来源：Journal of Micromechanics and Microengineering, 2007, 17(2): 193-198.

DOI：10.1088/0960-1317/17/2/002

Microceramic components have outstanding properties, such as high temperature resistant, biocompatible, chemically stable and high hardness properties, and could be used in a wide range of applications. However, the fabrication of precision micro-components has long been a barrier and limited their applications. This paper presents a soft lithography technique to fabricate near net-shape alumina micro-components. The process uses elastomer polydimethysiloxane (PDMS) to replace traditional solid moulds and leaves the green patterns intact after demoulding. The whole soft lithography technique involves the following steps: (i) fabricating high aspect ratio SU-8 moulds using UV photolithography, (ii) producing PDMS soft moulds from SU-8 masters, (iii) making aqueous high solids loading alumina suspension, (iv) filling patterned PDMS mould with the aqueous alumina suspension and (v) demoulding and sintering. The rheological properties (zeta potential and viscosity) of aqueous alumina suspensions have been characterized in relation to the varying pH values and concentration of dispersant (D-3005). The optimal parameters of alumina suspension for mould filling have been achieved at a pH value = 11; concentration of dispersant = 0.05 g ml(-1); amount of binder = 0.75%; highest solid loading = 70 wt%. After pressurized mould filling, complete, dense and free-standing micro-components have been achieved by using a 70 wt% alumina suspension and an optimum fabrication technique, while the overall linear shrinkage is found to be about 22%.

• 出版日期2007-2