Fabrication of high density gold nanoparticle arrays on glass for high sensitivity bio-detection

作者：Lhoste Kevin; Malaquin Laurent; Billot Laurent; Haghiri Gosnet Anne Marie; Chen Yong^*

来源：Microelectronic Engineering, 2011, 88(8): 2474-2477.

DOI：10.1016/j.mee.2010.11.053

• Nanofabrication
• Self assembly
• Nanoparticles
• Bio-sensors

We report a nanofabrication process to produce high density arrays of self-assembled gold nanoparticle on glass substrates which can be used for surface plasmon based bio-sensing. Capillary assisted particle assembly (CAPA) has been used to trap gold particles of 80-150 nm diameters into arrays of holes of 90-160 nm diameters made of polydimethylsiloxane (PDMS). A thermal assisted micro-contact printing technique was developed to transfer the assembled gold nanoparticles on the surface of a glass substrate using a spin coated thin layer thermoplastic polymer for adhesion. Our results showed that it is possible to obtain homogenous gold particle assembly with a pitch size down of 160 nm. The fabricated samples were used for optical determination of refractive indices of chemical solutions based on surface plasmon bio-sensing.

• 出版日期2011-8